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Abstract: Lead zirconate titanate (PZT) is a well-known piezoelectric material which has outstanding piezoelectric performance. PZT exhibits the strongest piezoelectric activity when its composition is close to the morphotrophic phase boundary between the rhombohedral and tetragonal phase fields. For this reason, PZT with a Zr/Ti ratio of 53/47 is widely used in various electromechanical device applications. In this presentation, four sorts of PZT-based piezoelectric MEMS devices will be introduced. Piezoelectric micromachined ultrasonic transducers have good ultrasonic receiving and transmitting performances and are suitable for in-air applications. The PZT-based piezoelectric micromirror can be actuated about two rotational axes in the mirror plane and for translational vertical scan (piston actuation). The piezoelectrically actuated nano-inkjet printheads improve the resolution of ink dispensing systems for high throughput, low cost, maskless lithography applications. Piezoelectric MEMS energy harvesters with low resonance frequencies can utilize the ambient vibrations and power the autonomous wireless sensor nodes.

讲座时间:2011年9月1日 15:30-16:30


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